Abstract
Abstract This paper presents a new diamond based microelectronic gas sensor for applications that require operation at a higher and wider temperature range and in harsh environments such as process control, exhaust emission and engine monitoring. The CO gas sensing performance and detection mechanism of the new sensor have been studied by using I – V and I – t characteristics as a function of gas concentration over a wide temperature range (50–500 °C). The gas sensitivity of the sensor is high, repeatable and reproducible. The response time is in seconds to a small concentration of CO gas. Gas detection mechanism of the new sensor is attributed to the modification of the oxygen vacancies in the SnO x layer through the reduction reaction between pre-adsorbed oxygen and CO gases.
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