Abstract
This article proposes a passive wireless switching array based on MEMS switches. By inductive coupling, AC signals are used as both power and control signals at the same time. The switching system includes four switching branches, each of which is composed of a receiving inductor, an AC-DC converting circuit, a MEMS switch, and a load. The detailed design of the circuit part and the MEMS switch are provided, respectively. The MEMS switches are driven by electrostatic combs and are fabricated based on the SOI process. The measured average actuation voltage of the fabricated MEMS switches is 20.4 V. The error between the measured average value and the design value is within 5%. The AC control signals are set to 7.8 MHz, 6 MHz, 4 MHz and 1.8 MHz corresponding respectively to the resonant frequencies of the four switching branches, and their peak to peak voltages are all set to 8V. Experiments verify that each AC control signal can only turn on its corresponding switching branch. Because of its passive wireless control strategy, it has potential applications in multi-channel wake-up systems.
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