Abstract
Vibration of the system base due to reaction force of rapid acceleration or deceleration motion of a stage is one of main causes for reducing life and productivity of the manufacturing equipment. This paper presents a passive RFC (reaction force compensation) mechanism for a linear motor motion stage. A systematic design process of the RFC system is developed based on a simple mathematical model of the RFC system. In addition, two ways are introduced to reduce the resonance vibration of the magnet track. Finally, a XY linear motion stage with the RFC mechanism is built, and the performance of the system is verified experimentally: In case of acceleration and deceleration of 10 m/s2, around 60% of residual vibration of the system base is reduced with the RFC mechanism.
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