Abstract
A high-temperature pressure sensor realized by the post-fire metallization on zirconia ceramic is presented. The pressure signal can be read out wirelessly through the magnetic coupling between the reader antenna and the sensor due to that the sensor is equivalent to an inductive-capacitive (LC) resonance circuit which has a pressure-sensitive resonance frequency. Considering the excellent mechanical properties in high-temperature environment, multilayered zirconia ceramic tapes were used to fabricate the pressure-sensitive structure. Owing to its low resistivity, sliver paste was chosen to form the electrical circuit via post-fire metallization, thereby enhancing the quality factor compared to sensors fabricated by cofiring with a high-melting-point metal such as platinum, tungsten or manganese. The design, fabrication, and experiments are demonstrated and discussed in detail. Experimental results showed that the sensor can operate at 600 °C with quite good coupling. Furthermore, the average sensitivity is as high as 790 kHz/bar within the measurement range between 0 and 1 Bar.
Highlights
The monitoring and management of performance and system health of hypersonic aerial vehicles, jet engines, rockets, and so on, relies on the capability to detect a variety of parameters including pressure [1]
Layer 2, and a capacitor is electrically connected to the inductor, which is designed as a circular planar spiral coil (PSC) and placed on the top surface of Layer 3
The stacked two-layer substrate was removed from the stacking machine, and a carbon membrane which has the same dimensions as the cavity and can volatilize within 600 °C, was placed into the cavity to support the pressure-sensitive membranes to avoid collapsing and cracking during the lamination process
Summary
The monitoring and management of performance and system health of hypersonic aerial vehicles, jet engines, rockets, and so on, relies on the capability to detect a variety of parameters including pressure [1] These applications are accompanied with high-temperature environments, which issue a great challenge to current commercial pressure sensors. Experiments have shown that most traditional sensors can only be operated at approximately 300 °C, despite the well-designed package, owing to the limited temperature resistance of the kernel sensing unit. Those package strategies will cause the volume expansion of components, which will lead to poor installation adaptability. At 600 °C, the induced impedance phase dip of the reader antenna related to the proposed sensor is 50° which is quite considerable compared with 6° induced by the cofired sensor
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