Abstract
Piezo-electric nano-positioning stages are being widely used in applications in which precision and accuracy in the order of nano, and high scanning speeds are paramount. This paper presents a Finite Element Analysis (FEA) of the parallel piezo-flexural nano-positioning (PPNP) stages to investigate motion interference between their different axes. Cross-coupling is one of the significant contributors to undesirable runouts in the precision positioning of PPNP actuators. Using ABAQUS/CAE 2018 software, a 3D model of a PPNP stage was developed. The model consists of a central elastic body connected to a fixed frame through four flexural hinges. A cylindrical stack of multiple piezoelectric disks is placed between the moving central body and the fixed frame. Extensive simulations were carried out for three different friction coefficients in the piezoelectric disks’ contact surfaces, different frame materials, and different geometrical configurations of the stage and the hinges. As a result, it was observed that the primary root cause of the mechanical cross-coupling effect could be realized in the combination of the slip and rotation of the piezoelectric disks due to their frictional behavior with the stage moving in the tangential direction, concurrent with changes in the geometry of the stage.
Highlights
This paper presents a Finite Element Analysis (FEA) of the parallel piezo-flexural nano-positioning (PPNP) stages to investigate motion interference between their different axes
It was observed that the primary root cause of the mechanical crosscoupling effect could be realized in the combination of the slip and rotation of the piezoelectric disks due to their frictional behavior with the stage moving in the tangential direction, concurrent with changes in the geometry of the stage
FEA simulations are carried out to investigate the effects of different mechanical properties, frictional behavior, and geometry of parallel piezoflexural nanopositioning (PPNP) stages on the mechanical cross-coupling effect between their different axes
Summary
Li and Xu [36] presented the process of designing and manufacturing a nano-positioning platform with compound parallelogram flexures and bridge-type displacement amplifiers They derived analytical models for the mechanical performance evaluation of the stage in terms of stiffness, load capacity, kinematics, and dynamics and verified their results through FEA. Nagel et al [38] predicted the dual-stage, three-axis hybrid parallel-serial-kinematic nano-positioner’s parasitic motion by introducing a new parallel-kinematic mechanism that can eliminate the effects of planar coupling Their results indicated the potential of the non-orthogonal mechanical amplifier design in minimizing the widespread cross-coupling nonlinearity of the parallel-kinematic designs. A novel frictionalorder normalized Bouc-Wen (FONBW) model was utilized to characterize the nonlinear hysteresis of the stage in conjugation with the rigid-flexible coupling dynamic model They developed an inverse FONBW-based hysteresis compensator with a decentralized control model to enhance the motion tracking performance by making the multi-input multi-output (MIMO) system decoupled
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