Abstract
Some improvements of the ultra-HVEM (HU-2000) for STEM-EELS in Osaka Univ. are summarized. At first, the stability of the accelerating voltage of the ultra-HVEM was improved to realize the parallel detection EELS. Two compensators for the residual instability of the accelerating voltage and the beam trajectory were attached; the beam deflection due to the HF leakage magnetic fluxes was cancelled out by a deflection coil attached above the lens column and the spectrum shift due to the ripple and drift of accelerating voltage was compensated by the deflectors in front of the detector
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