Abstract
In this paper, the design, optimization, and application of a parallel three-degree-of-freedom micro-nano motion stage for vibration-assisted milling are reported. This stage is driven by the piezoelectric effect to achieve precise position adjustment. A compound differential branch chain is designed to solve the poor stiffness of traditional branch chains and large deflection errors. Mechanical properties of the stage are theoretically, numerically, and experimentally investigated. The output displacement and natural frequency are weighed by orthogonal optimization. The open-loop tests on the prototype showed the stage performance such as hysteresis, tracking, and decoupling. Milling of typical microstructure surfaces is employed to demonstrate the effectiveness of the stage.
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