Abstract
This paper presents the design and testing of a one-axis piezoelectric accelerometer made from cellulose paper and piezoelectric zinc oxide nanowires (ZnO NWs) hydrothermally grown on paper. The accelerometer adopts a cantilever-based configuration with two parallel cantilever beams attached with a paper proof mass. A piece of U-shaped, ZnO-NW-coated paper is attached on top of the parallel beams, serving as the strain sensing element for acceleration measurement. The electric charges produced from the ZnO-NW-coated paper are converted into a voltage output using a custom-made charge amplifier circuit. The device fabrication only involves cutting of paper and hydrothermal growth of ZnO NWs, and does not require the access to expensive and sophisticated equipment. The performance of the devices with different weight growth percentages of the ZnO NWs was characterized.
Highlights
Over the past three decades, there have been numerous advances made in microfabricated sensors and actuators
Quality Assessment of zinc oxide nanowires (ZnO NWs) Grown on Paper
We investigated theineffect of time on the weight growth percentage of ZnO NWs on paper
Summary
Over the past three decades, there have been numerous advances made in microfabricated sensors and actuators. As the research and development on microelectromechanical systems (MEMS) progress, it is increasingly common to integrate materials other than silicon into MEMS transducers. Among these developments, piezoelectric materials in either bulk or thin film forms have been integrated into MEMS devices for a variety of applications such as acoustic resonators [1,2], quartz crystal microbalance [3,4], Surface acoustic wave (SAW)-based chemical and biochemical sensors [5,6], accelerometer [7,8,9,10] and ultrasonic transducers [11,12]. There have been significant advances in paper-based transducers and electronics [13,14], and various electronic devices have been developed such as radio-frequency identifications (RFIDs) [15,16], biosensors [17,18,19], MEMS [20,21,22], transistors [23,24], capacitors [25,26], Micromachines 2018, 9, 19; doi:10.3390/mi9010019 www.mdpi.com/journal/micromachines
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