A palm-top camera for 3D profilometry using a single MEMS mirror

Abstract

To realize a compact three-dimensional profile measurement system that is based on pattern projection method, we have proposed incorporating a recent digital device such as a MEMS scanner into projection optics. Due to this revision, first of all, such a small size system like a palm-top camera became attainable, and low cost measurement system has been potentially realized. In this system, we control a single MEMS scanner to produce the projection pattern with appropriate periodical structure and sinusoidal intensity distribution. Due to this flexibility in pattern projection, such a compact camera as a palm-top size is attainable. We adopted phase-shifting technique which is most popular technique applicable to profile measurement and inspection in automobile industry and others. This camera will be potentially as small as a photographic digital camera in dimensional size. In addition, we propose to use RGB color projection system to make up for the shortcomings such as short depth of field inherent to conventional systems and, at the same time, we aim to attain higher speed of measurement.