A package for piezoresistive pressure sensors with embedded built-in self-test function based on bimetallic actuator

Abstract

Piezoresistive pressure sensors have been widely used in the industry and many other fields. However, conventional pressure sensor inspection is performed with the device off, which causes several inconveniences. In this article, an electrothermal actuator is designed and fabricated on the basis of bimetallic alloy material to realise the self-test of the piezoresistive silicon pressure sensor, and a kind of pressure sensor package structure with self-test capability is developed using the electrothermal actuator. Experimental results show that the structure can realise the dual excitation of the pressure and temperature of the diffused silicon pressure sensor core and enable it to return to the normal working state in less than 3.3 s. The self-test module can be driven at a low voltage of 0.8 V at less than 618 mW and can reflect the performance of the pressure sensor quickly and accurately. The structure is suitable for most differential pressure, absolute pressure sensor chips.