Abstract

A numerical analysis was conducted with regard to the flow characteristics and pumping performance of a radial flow thermo-pneumatic micropump with electromagnetic resistance. This study revealed that the flow of the working fluid with electric conductivity can be controlled by the electromagnetic resistance generated by the magnetic field periodically applied to the inlet and outlet of the thermo-pneumatic micropump. The actuator of the pump consists of the cavity, the micro-heater inside the cavity, and the diaphragm. The behavior of the diaphragm was simulated with the Prescribed Deformation Model. The internal flow characteristics and pumping performance of the micropump with respect to the intensity of the magnetic field and the maximum displacement of the diaphragm were assessed. The pumping flow rate of this micropump tended to linearly increase with the intensity of the magnetic field and the maximum displacement of the diaphragm, and the micropump showed a greater pumping flow rate and a wider flow rate range than the conventional diffuser/nozzle micropump.

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