Abstract
This paper presents the design, modeling, and experimental validation of a novel XYZ micro/nano positioner driven by piezoelectric actuator (PEA). To achieve a large motion stroke, compact structure and good decoupling performance, a novel displacement amplifier including L-shape levers and half-bridge (LSLHB) is proposed. By utilizing a concave input mechanism for location restriction between PEA and flexible mechanism, the motion coupling caused by the inconsistent central axes of the PEA and input mechanism is eliminated. The XYZ micro/nano positioner mainly consists of a parallel XY stage and a Z stage nested on the XY stage. The XY stage is constructed with four LSLHB amplifiers which are orthogonally arranged to realize X- and Y- axis motion and kinematic decoupling. The characteristics of the positioner are studied by analytical modeling and finite element analysis. The XYZ micro/nano positioner is manufactured by wire electrical discharge machining, and the performance of the positioner is evaluated through experimental tests. The results show that the stage can implement three degree-of-freedom translational motion with a workspace of 128.1 μm×131.3 μm×17.9 μm, and the coupling errors in the non-working direction is less than 1.56 % of the motion stroke, and motion resolution is 8 nm.
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