Abstract
Although the pass band of a SFIT SAW filter based on a semi-infinite substrate is wide enough, it always accompanies with the inclined pass-band, attributed to the influence of transducer impedance. In this paper, we propose a novel weighted method to compensate with the pass-band inclination by the dispersive relation of electromechanical coupling coefficient in a layered piezoelectric medium. First, we derived the coupling-of-models (COM) model, valid for layered SAW devices with SFITs, to calculate frequency responses of SFIT SAW filters on layered piezoelectric substrates. To verify the validity of the proposed method, a wide-band layered SAW filters using SFITs on AlN/silicon are analyzed based on the COM model. Results show that the dispersion of the layered piezoelectric media is favorable for the SAW filters using SFITs applied in wide-band filters.
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