Abstract
In this paper, a novel two-axis differential resonant accelerometer based on graphene with transmission beams is presented. This accelerometer can not only reduce the cross sensitivity, but also overcome the influence of gravity, realizing fast and accurate measurement of the direction and magnitude of acceleration on the horizontal plane. The simulation results show that the critical buckling acceleration is 460 g, the linear range is 0–89 g, while the differential sensitivity is 50,919 Hz/g, which is generally higher than that of the resonant accelerometer reported previously. Thus, the accelerometer belongs to the ultra-high sensitivity accelerometer. In addition, increasing the length and tension of graphene can obviously increase the critical linear acceleration and critical buckling acceleration with the decreasing sensitivity of the accelerometer. Additionally, the size change of the force transfer structure can significantly affect the detection performance. As the etching accuracy reaches the order of 100 nm, the critical buckling acceleration can reach up to 5 × 104 g, with a sensitivity of 250 Hz/g. To sum up, a feasible design of a biaxial graphene resonant accelerometer is proposed in this work, which provides a theoretical reference for the fabrication of a graphene accelerometer with high precision and stability.
Highlights
An accelerometer is a sensor that measures acceleration by calculating the inertia force or displacement of proof mass under external acceleration
Two graphene resonant beams working in a differential state were designed on each axis, which improves the sensitivity of acceleration measurement
By optimizing the corresponding parameters of graphene and the size of the proof mass and transmission beams, the accelerometer was designed to meet the requirements of a proper measuring range and high sensitivity
Summary
An accelerometer is a sensor that measures acceleration by calculating the inertia force or displacement of proof mass under external acceleration. The resonant accelerometer measures acceleration based on the highly sensitive response of the resonant frequency of the oscillator to stress. It was found that when the acceleration was in the range of 1010 ∼1014 g, the resonant frequency increased linearly with the acceleration on the logarithmic-logarithmic scale On this basis, they studied the resonant characteristics of the crossroad-type graphene accelerometer. Two graphene resonant beams working in a differential state were designed on each axis, which improves the sensitivity of acceleration measurement. By optimizing the corresponding parameters of graphene and the size of the proof mass and transmission beams, the accelerometer was designed to meet the requirements of a proper measuring range and high sensitivity
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