Abstract
This paper introduces a novel tri-axial capacitive force sensor. The sensor can measure the force vector, is embedded in soft 7 mm-thick silicone skin, enables temperature sensitivity compensation and has digital output. To measure the force vector, tilted capacitive sensor elements are used which are facing in different directions to differentiate the tangential forces. The sensor is intended for distributed contact sensing in a robotic skin, but could be also used for other applications such as novel haptic user interfaces in wearable devices. A series of experiments was performed and showed good sensor characteristics. The concept of the tilted force transducers has been proven to have the capability of detecting the force vector acting on the local sensor surface.
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