A novel tilt assembly for ultrahigh vacuum XYZ-rotary manipulators

Abstract

A novel sample tilt assembly was developed for ultrahigh vacuum XYZ-rotary manipulators which have the sample surface normal on the manipulator rotation axis. With conventional tilt mechanisms, sample azimuth and tilt angle cannot be varied independently since the rotation motion is about the manipulator axis, not the tilted sample normal. The present design allows sample tilt of ±10° and independent 360° rotation about the tilted sample surface normal.