Abstract
A novel three-axis sensor for simultaneous and independent magnetic-field components measurement based on the Hall effect has been implemented and tested. On the upper side of n-Si substrate, a 10 colonm deep rectangular- shaped p-ring sized 50 x 160 colonm2 has been formed. In the n-zone surrounded by p-well, through six ohmic contacts, two parallel-field Hall devices for in-plane BBx and BBy components registration and one orthogonal Hall element for Bz detection has been functional integrated. The 3D magnetometer has been fabricated using silicon planar technology. The experimentally obtained magnetosensitivities are Sx ≈ 41V/AT, Sy ≈ 43V/AT and Sz ≈ 49V/AT, the cross- sensitivity reaches no more than 3%, the non-linearity is 1–2%, the noise spectral density on all outputs at frequency f ≤ 1000Hz is of the 1/f type and the sensor detectivity is BBmin ≈ 21 colonT. The spatial resolution is 50 x 160 x 10μm3.
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