Abstract
With the growing importance of micro machining, it has become important to characterise the profile of slot surfaces in order to understand the machining process in detail. In this paper, a novel optical layout adapting the concept of Mirau interferometry to polarization optics, in combination with instantaneous phase shifting interferometry, for measurement of slot surfaces is described. Experiments were carried out with this setup on a wafer surface with slot and the results were compared with that of a commercial surface profiler to demonstrate the applicability of the principle. The results obtained, were discussed with reference to the beam spot size, positioning of the object and the vertical resolution of the measurement setup, and compared with that of the commercial surface profiler.
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