Abstract
The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the stage, which influences the load capacity, dynamic performance, and positioning accuracy of the PASSNS. Toward solving the influence problems of friction force, this paper presents a novel stick-slip nanopositioning stage where the flexure hinge-based friction force adjusting unit was employed. Numerical analysis was conducted to estimate the static performance of the stage, a dynamic model was established, and simulation analysis was performed to study the dynamic performance of the stage. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the maximum forward and backward movement speeds of the stage are 1 and 0.7 mm/s, respectively, and the minimum forward and backward step displacements are approximately 11 and 12 nm, respectively. Compared to the step displacement under no working load, the forward and backward step displacements only increase by 6% and 8% with a working load of 20 g, respectively. And the load capacity of the PASSNS in the vertical direction is about 72 g. The experimental results confirm the feasibility of the proposed stage, and high accuracy, high speed, and good robustness to varying loads were achieved. These results demonstrate the great potential of the developed stage in many nanopositioning applications.
Highlights
A positioning stage with nanometer resolution is widely used in many fields such as bioengineering, nanomanipulation, and nanometrology [1,2,3,4,5]
Stages developed by the stick-slip drive principle have a compact structure, and provide high resolution and long travel range [17], which enables this kind of stage to be commonly employed in the scanning electron microscope (SEM)
As known to all, friction force plays an important role in the successful movement of the piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS)
Summary
A positioning stage with nanometer resolution is widely used in many fields such as bioengineering, nanomanipulation, and nanometrology [1,2,3,4,5]. Shimizu et al utilized the stick-slip principle and piezoelectric actuators to develop an XY positioning stage [25]. The 1-DOF linear positioning stage (Model SLC-1720), a classic product of SmarAct GmbH, is designed based on the stick-slip driving principle; its maximum stroke is 12 mm, the maximum resolution is 50 nm, the speed is more than 20 mm/s, the weight is only 13 g, and the size is 22 × 17 × 8.5 mm3 [26]. The PASSNSs reported in these literatures and some commercialized products research focuses are different, they are more about the structural design and positioning performance of the stage itself. IInn order ttoorereaalilzizeethtehemomvoevmeemnetnptospiotisointiionnginwgithwnitahnonsacnaolescpaolesitpioonsintigonpienrgforpmerafnocremaanndcestraonndg srtorobnugstnroesbsutsotnloeasds cthoalnogaed, achnaonvgeleP, AaSnSoNvSelinPteAgSrSaNtedS winitehgaraflteexdurweihthingaef-lbeaxsuerdefrhiicntigoen-bfoarsceedadfrjiucstitoinng fsotrrcuectaudrejuwstaisngdesvterluocpteudr.eInwaadsdditeiovne,lowpeebdu. iIltna agdendeitriaolnd,ywnaembicumiltodaelgaennderpaelrfdoyrnmaemdiac smimoudlealtioanndto paenrafolyrzmeetdheainsflimueunlacteioonf vtaoriaonuaslypzaeratmheetienrfsluoenntchee opfervfaorimouans cpeaorfamthetsetrasgoe.nFtihnealplye,refxoprmeraimnceentosfwtheree sctaogned.uFctiendalolyn, aepxrpoetroimtyepnetos f wtheeredecvoenlodpuecdtePdAoSnSNaS.pHroigthotaycpceuroafcyt,hheigdhesvpeeloedp,eldargPeAlSoSaNdSc.apHaicgithy, aacncdurlaacryg,ehtirgahveslpreaendg,elawrgeereloaacdhiceavpedac, iwtyh, iacnhddleamrgoentsrtarvateelsrathnagtethwisersetaagcehiheavsesdi,gwnihfiiccahndt epmerofonrsmtratnecse tahnadt tphoistesntatigael hinasmsaignnyifaipcapnlitcpateirofnosr.mance and potential in many applications
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