Abstract

A novel system and its corresponding method for the measurement and the exact reconstruction of a pair of parallel profiles are designed. There are six sensors installed on the measuring device and they are divided into two groups with different sensor spacings. The exact reconstruction can be realized under the condition of a high lateral resolution, as the straightness error, the yaw error, the zero-adjustment error, and the data processing error can be all eliminated through two scannings and certain data processing method. The measurement error of the displacement sensors can also be suppressed. The new method has the following advantages: (i) the realization of the exact reconstruction, (ii) a high lateral resolution of the reconstruction result which is independent of the sensor spacings, (iii) the skip of the zero calibration before the measurement process, and (iv) the suppression of the sensor random error. These advantages are demonstrated by the theoretical analyses and the simulations. Experiments are also conducted to prove some of these characteristics.

Highlights

  • The guiding devices, such as a set of guide-ways or parallel plates in equipment, are generally regarded as a pair of parallel profiles whose accuracy greatly influences the smoothness and service life of the devices

  • The reconstruction result without data processing error can be obtained under a high lateral resolution theoretically, but in order to adjust the relative positions of the different groups of reconstruction points, these methods assume a completely smooth part of the measured profile, which limits the feasibility and the accuracy of the measurement result

  • Comparing the reconstruction results of feeler gauge edges on f2, and f4 with that on f1, the stepwise variations are smoothed by the data processing error when using the GTRP and the generalized twopoint method (GTP) method

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Summary

INTRODUCTION

The guiding devices, such as a set of guide-ways or parallel plates in equipment, are generally regarded as a pair of parallel profiles whose accuracy greatly influences the smoothness and service life of the devices. The CTP method combines the STP and the GTP methods, and the CTRP method blends the STRP and the GTRP methods Using these two methods, the reconstruction result without data processing error can be obtained under a high lateral resolution theoretically, but in order to adjust the relative positions of the different groups of reconstruction points, these methods assume a completely smooth part of the measured profile, which limits the feasibility and the accuracy of the measurement result. Clemens Elster et al developed a new method [16], [17] which combines a multi-sensor system with a laser collimator to eliminate several errors that have major impacts on the reconstruction results, including straightness error and yaw error of the measurement reference and the zero-adjustment error. The reconstruction result calculated from these values will not be impacted by this type of error

THE RECONSTRUCTION OF THE MEASURED PROFILES
SIMULATIONS
EXPERIMENT
CONCLUSION
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