Abstract
In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is in the whole measurement range from to .
Highlights
Accurate tilt measurement is of great significance in many areas of civil, industrial and military uses
The tilt sensor was mounted in the vertical plane on a rotary table, which is placed in a vacuum chamber
The closed-loop tests are suitable for practical application field, and it is the first step of industrialization of MEMS resonant sensors
Summary
Accurate tilt measurement is of great significance in many areas of civil, industrial and military uses It has been utilized in somatic games, remote health monitoring for large structures, inertial navigations and etc. An external circuit is needed to convert these responses to electrical signal, and angular tilt can be got through processing the electrical signal Among those above, resonant MEMS tilt sensors are more attractive due to their quasi-digital output signal and high accuracy. Plenty of work have been devoted to improve the reliability and sensitivity of the resonant MEMS tilt sensors. It is still hard to achieve a high sensitivity in a larger measurement range because of the sensor design and the related sensing mechanism. A novel MEMS tilt sensor is proposed to overcome the limited measurement range of high sensitivity. The experimental results indicate that the tilt sensor can maintain a high sensitivity in the whole measurement range from 0◦ to 360◦
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