Abstract
This paper presents for the first time single metal layer step-down on-chip transformer. The design is characterized for VHF and UHF frequency ranges. The prototype is coreless (air core), which is suitable for high frequency operations. The design is fabricated in a standard Metal-MUMPs fabrication process, which offers a single structure layer. The primary inductance of 10.7nH and the transformer quality factor of 8.8 have been achieved at 1GHz. The coupling coefficient is 0.60 and the efficiency is 76% with matched load at 1GHz. The total footprint area of micro-transformer is 0.49mm2.
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