Abstract
Abstract A modified C / V (capacitance/voltage) measuring set-up for the synchronous operation of several EIS (electrolyte–insulator–semiconductor) sensors was developed. Therewith, the simultaneous detection of different substances in aqueous analytes is possible by using capacitive sensors that can easily be manufactured. This novel method is exemplarily demonstrated for a sensor array based on a pH-sensitive EIS structure (Al/Si/SiO 2 /Si 3 N 4 ) and a penicillin-sensitive EIS structure (Al/Si/SiO 2 /Si 3 N 4 /penicillinase). Both sensors are connected in parallel with each other. By using two additional d.c. voltage sources the single C / V curves are shifted against each other along the voltage axis. The resulting `step-like' C / V curve allows the distinct assignment of each step fraction to the corresponding sensor, and thus the simultaneous detection of the pH and penicillin concentration in a single measurement.
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