Abstract
A novel Si film with Si nanocrystals embedded in amorphous Si matrix was grown on Cu foil via an inductively coupled plasma-enhanced chemical vapor deposition and subsequent electron beam irradiation. The Si nanocrystals show spherical morphology with rich defects and the mean size is about 6nm. The electrochemical performance of the obtained Si as anode for lithium ion batteries was studied via conventional charge/discharge test, which shows distinct improvement on cycle performance compared with that of amorphous Si obtained without electron beam irradiation.
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