Abstract
A novel topology of surface acoustic wave (SAW) humidity sensor was proposed. An interdigital electrode (IDE) was added in serial with a SAW resonator (SAWR) as the sensitive component. Silicon-containing polyelectrolyte humidity sensitive film was deposited on the surface of IDE instead of SAWR. By this way, the stringent technical requirements for film coating on SAW surface could be avoided, which was helpful to bring down the processing cost of the sensor. At the same time, vacuum packaged SAWR could provide a more stable and high operating frequency (433 MHz) for the sensor, which was profitable for both stability and sensitivity of the sensor. Sensitivity, stability, response-time, temperature coefficient of the novel sensor were tested and compared with the traditional SAWR sensor in our previous work. The results showed that both sensitivity (0.4 kHz/%RH at low humidity level; >1 kHz at high humidity level) and stability (noise level <10 Hz) of the sensor have got remarkable improvement for the new design.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
