Abstract
This work demonstrated the concept of using “sequential engagement of comb electrodes” to improve the linearity and maximum deflection of vertical combdrive actuator (VCA). This concept is achieved by varying the in-plane distribution of comb electrodes. The simulation and experiment results of VCA with four different electrode-distribution designs demonstrated the feasibility of this study. In comparison, a modified (Reverse curve-distribution) VCA was remarkably improved the performance of conventional (Linear-distribution) VCA. Experiments show that the Reverse curve-distribution VCA improves the nonlinearity for 50% and increases the maximum angular motion for 3.5- fold.
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