Abstract

In recent years, vacuum-based deposition of antimony selenide (Sb2Se3) thin films has garnered significant attention owing to its easy and impurity-free fabrication, along with exceptional power conversion efficiency (PCE). However, the necessary post-selenization process comes with a shortcoming of instigating buried Sb2Se3/molybdenum (Mo) back-contact interface defects. This study introduces a novel Se-diffusion post-selenization technique to precisely regulate the selenium reaction atmosphere, preventing void formation on the Sb2Se3 thin film surface and maintaining film quality for enhanced device efficiency. An optimized selenization condition with a precise Se precursor film thickness led to obtaining highly crystalline, preferentially (hk1) oriented, and large-grained Sb2Se3 films. Furthermore, a meticulous Se diffusion in Sb2Se3 film reduced the inevitable MoSe2 layer thickness at the Mo surface, thereby enhancing the quality of the back contact interface. The Sb2Se3 solar cell that was selenized to optimal level showed significant enhancements, raising the fill factor from 40.06 % to 45.12 % and improving the device efficiency from 2.89 % to 3.57 %. Our newly developed selenization strategy establishes a successful approach to regulate the Sb2Se3 film quality by addressing a crucial challenge in improving the efficiency of antimony chalcogenide solar cells.

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