Abstract
Under the same driving voltage and frequency, the forward and reverse motion inconsistency of stick-slip piezoelectric actuators would bring difficulty for subsequent control. To solve this problem, a rotation-structure based piezoelectric actuator with completely symmetric structure and two driving feet was initially proposed. By testing its output performances under various driving voltages and frequencies, it was confirmed that, although similar speeds could be achieved for forward and reverse motions, the maximum displacement and backward displacement in each step were still quite different. By analyzing the reasons leading to this difference, this actuator was further improved by using only one driving foot. The experimental results showed that the forward and reverse motion consistency of the improved actuator had been significantly improved. The deviation rate was only 1.6%, corresponding to a travel distance of 118.7 μm, obtained under the driving voltage of 100 V and driving frequency of 10 Hz. The comparison with some previously reported actuators further confirmed the advancement of this improved actuator.
Highlights
Precision positioning and driving technology has huge development prospects in future microscopic research work
Compared with other types of actuators, stick-slip piezoelectric actuators have the advantages of simple structure and convenient control; they have been widely investigated in recent years
The working principle of the actuator and structural analysis of the flexible hinge mechanism was discussed in detail, followed by measuring and evaluating its forward and reverse motion performances under various driving voltages and frequencies
Summary
Precision positioning and driving technology has huge development prospects in future microscopic research work. For many previously reported stick-slip actuators, one problem exists, i.e., it is difficult for the output performances of forward motions to be consistent with those of the opposite direction [22,23,24,25,26]. In [24], due to the asymmetric structure, the forward motion speed is 0.30 mm/s and the reverse motion speed is 0.37 mm/s under the driving voltage of 100 V and driving frequency of 10 Hz, which has quite a large deviation rate of 20.90% To solve this problem, some stick-slip piezoelectric actuators used two identical driving mechanisms, which were assembled symmetrically. In this paper, a piezoelectric actuator with a rotation-structure is proposed to solve the problem of inconsistency in forward and reverse motions.
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