Abstract

We report a novel rotary piezoelectric motor using bending transducers in this work. Three transducers are used to drive a disk-shaped rotor together by the elliptical movements of their driving tips; these motions are produced by the hybrid of two first bending vibration modes. The proposed piezoelectric transducer has a simple structure as it only contains an aluminum alloy beam and four pieces of PZT plates. Symmetrical structure is the only necessary condition in the design process as it will ensure the resonance frequencies of the two orthogonal first bending modes are equal. Transducers with first bending resonance frequency of about 53 kHz were fabricated and assembled into a rotary motor. The proposed motor exhibits good performance on speed and torque control. Under a working frequency of 53.2 kHz, the maximum no-load speed and the maximum torque of the prototype are tested to be 53.3 rpm and of 27 mN·m.

Highlights

  • Piezoelectric motors have been seen as successors of the electromagnetic ones in areas such as robot joints, high precision machines, micro robots and MEMS

  • We report a novel rotary piezoelectric motor using first bending hybrid transducers

  • Both these two motors achieved rotary driving by the superimposing of two first bending vibrations of a beam, but they operated in different ways

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Summary

Introduction

Piezoelectric motors have been seen as successors of the electromagnetic ones in areas such as robot joints, high precision machines, micro robots and MEMS. The ring-shaped traveling wave piezoelectric motor is the most classic and successful one for rotary driving; but it has a complicated operating principle as it needs to generate two bending standing waves with the same frequency, the same amplitude, a temporal shift of 90° and a spatial distance of one quarter wavelength. These requirements make it difficult to be fabricated and controlled. The dimensions of the bending transducer can be adjusted freely to satisfy different requirements for space and weight, and more transducers can be set into the motor to increase its output torque

Structure and Operating Principle
Working Frequency of the Bending Transducer
Movement of the Driving Tip
Fabrication and Measurement
Conclusions
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