Abstract
A novel micro-electromechanical resonator based on in-plane mode was presented for the measurements of fluid density and viscosity. With the purpose of enhancing the quality factor of micro resonator, double vibrators were connected by a center beam to not only drive the resonant structure in in-plane vibration mode but also reduce the vibration stress to be concentrated in the fixed terminal. Finite element analysis and numerical simulation were conducted to analyze and optimize the resonator structure. Based on the simulated analysis, its quality factor reached highly to 96 in ethanol with the resonant frequency of approximately 34 kHz. And the stress amplitude up to MPa on the center beam had strong relationship with both of the fluid characteristics and output voltage, which benefited to improve the measurement accuracy of fluid density and viscosity based on the piezoresistive principle.
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