A novel rapid electropulsing treatment on AZO thin ceramic films

Abstract

AZO thin films were deposited on quartz glass and were treated with electropulsing. Effect of the electropulsing on AZO films was investigated by X-ray diffraction (XRD), scanning electron microscopy(SEM), Atomic Force Microscopy (AFM), Hall Effect measurement and UV–visible transmittance spectra. The results showed that AZO films treated with 8min electropulsing treatment (EPT) presented better crystallization, higher visible transmittance with blue-shift, smooth surface and the lowest electrical resistivity of 8.8×10−4Ωcm. However, further EPT would degenerate the film properties. After 8min electropulsing, the electrical conductivity of the AZO thin films increased by about 81%. These results indicate that the fast and low-energy consumed EPT may be a promising substitution for traditional heat annealing.