Abstract
Traveling-wave ultrasonic micromotor is a promising technology for microactuation and nanopositioning. A special designed annular stator was proposed with the combination of two separate buffer structures to achieve high performance. Traveling-wave propagation with moving antinodes was observed and analyzed. The fabricated stator exhibits large displacement of $4.71~\mu \text{m}$ at 1 V and high quality factor of 220 with the central frequency of 101.6 kHz. The assembled rotor was actuated, and controllable rotate speed was achieved. The measured maximum torque reached to $2.63~\mu $ Nm at 1.3 V and 101 kHz. Besides, unconstraint rotation with no lateral slip was found during the entire rotation process, indicating stable, uniform, and highly reliable actuation of the micromotor. [2018-0026]
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