Abstract
A planar piezoelectric actuator using bending-bending hybrid modes is proposed. The actuator is composed four uniform transducers that can bend in the horizontal and vertical directions dependently. The actuator can operate in two modes: dynamic mode and quasi-static mode. The dynamic mode uses the hybrid bending resonance modes to achieve a large travelling range with high speed; the quasi-static mode uses the quasi-static horizontal bending to achieve a micrometre travelling range with nanometer resolution. The operating principle is discussed and simulated by finite element method (FEM). Maximum linear and rotary speeds of 19.8 mm/s and 0.266 rad/s are obtained under a voltage of 400 Vp-p and frequency of 11.86 kHz in the dynamic mode. When operating in quasi-static mode, there is a linear relationship between the output displacement and voltage, linear and rotary displacement resolutions of 16 nm and 0.198 μrad are obtained. The actuator can accomplish large travelling range with nano-positioning ability.
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