Abstract
For improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers, the dependency between the stress of the piezoresistor and the displacement of the structure is taken into consideration in this paper. In order to weaken the dependency, a novel structure with suspended piezoresistive beams (SPBs) is designed, and a theoretical model is established for calculating the location of SPBs, the stress of SPBs and the resonant frequency of the whole structure. Finite element method (FEM) simulations, comparative simulations and experiments are carried out to verify the good agreement with the theoretical model. It is demonstrated that increasing the sensitivity greatly without sacrificing the resonant frequency is possible in the piezoresistive accelerometer design. Therefore, the proposed structure with SPBs is potentially a novel option for improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers.
Highlights
Vibration signals usually present different parameters, including velocity, displacement or acceleration, that can be measured by a velocity sensor, a displacement probe or an accelerometer, respectively
For improving the tradeoff between the sensitivity and the resonant frequency, a novel structure with suspended piezoresistive beams (SPBs) is proposed for weakening the dependency between the displacement and σ in accelerometer design
It is shown that the tradeoff between the sensitivity and the resonant frequency is changed by the stiffening effect combined with the hinge and the SPBs
Summary
Vibration signals usually present different parameters, including velocity, displacement or acceleration, that can be measured by a velocity sensor, a displacement probe or an accelerometer, respectively. Accelerometers is some of the most popular vibration sensors because of their convenience. The sensitivity and resonant frequency are often chosen as the most significant performance characteristics to optimize the structure. Due to the working principle based on the spring-mass system [1–3], the maximum displacement of the system is often regarded as an important manifestation of the accelerometer sensitivity. Piezoresistive or piezoelectric accelerometers count on the electrical variations caused by a stress, but the outputs in essence arise from the displacement of the spring-mass system [4–13]. The output is directly affected by the displacement of the spring-mass system [14–16]
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