Abstract
A novel fiber reference optical readout method was proposed in the bi-material micro cantilever infrared imaging system, which consists of an infrared imaging channel, an optical readout channel and a fiber reference channel. The fiber reference channel is used to monitor the intensity fluctuation of the light source, and provide a signal to correct the distortion of the infrared images from the optical readout channel. Comparing with the typical optical readout method without any references, the noise equivalent temperature difference (NETD) of such an infrared imaging system with the fiber reference optical readout method can be reduced by about 33% and edges of the IR images become clearer.
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