A Novel Noise Resistance Optical Accelerometer Based on Micro-Ring Resonant Cavity

Abstract

To meet a high-precision accelerometer resistance of temperature, humidity and other external noise, a new multi-ring cascade optical accelerometer structure is designed. The micro-ring resonator on the cantilever beam based on the photo-elastic effect and the contrast are fabricated with the same manufacturing process and size, which can effectively meet the consistency of the contrast and test micro-ring resonator on the cantilever. The one resonance point curve will split into two under the acceleration, thus the acceleration value can be obtained by detecting the wavelength of the two resonant points. By testing the cascade race-track shaped micro-ring resonator at different temperatures, the Q=104, the test requirement of cascade race-track shaped micro-ring accelerometer in different environments is greatly met. The design can be widely applied to the occasions of penetration system with high impact, strong vibration and so on. And the anti-noise and anti-jamming features of the integrated miniaturized high-sensitivity MOEMS sensors are realized.