Abstract
A novel image formation system was created using a photo-initiated ring-opening cationic polymerization of epoxides. This photopolymer incorporates cationic amplification based on acid catalysis as a route to high sensitivity, using a unique photo-acid generator (PAG) to induce the formation of a soft acid. The films formed from these photopolymers consist of various polymers, epoxide monomers, and 4-cumenyl-4'-tolyliodonium tetrakis(pentafluorophenyl)borate (CTI-TB). The reactions and rates of the polymerizations in the polymer film were characterized using FT-IR spectra and RT-IR spectra. A preliminary lithographic evolution of this material revealed that negative images with features in the 0.75 μm range could be resolved.
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