A Novel Negative Capacitance FinFET With Ferroelectric Spacer: Proposal and Investigation.

Abstract

In this letter, for the first time, we investigate the role of Ferroelectric (FE) spacer in a negative capacitance (NC) FinFET. Using well-calibrated TCAD models, we found that instead of placing a dielectric (DE) spacer, if we use an FE spacer, enhanced electric field due to FE polarization can be achieved, thereby producing a higher ON-current. The fringing fields polarize the FE spacer and result in voltage amplification, which lowers the effective barrier and increases the current driving capability. ON-current of the proposed configuration, i.e., FE spacer at the source (S) side and DE spacer at the drain (D) side, is ~30% higher than the baseline FinFET. In this work, we have also proposed four different spacer placement configurations to realize better performances in terms of higher ON-current, mitigation of negative differential resistance (NDR) and better subthreshold slope (SS), and so on. We found that the optimized performance can be attained by placing an FE and DE spacer at the S and D end, respectively. We also evaluated a design space window for a good capacitance match to achieve NC effect for optimized device design.