Abstract
This work proposes a novel electrostatic mechanically coupled narrowband filter based on width extensional mode (WEM) resonators. Rectangle plate WEM resonators have the potential for high quality factor (Q) and low motional resistance. The rectangle plate was slotted to reduce thermoelastic loss and optimize mode shape coefficient of WEMs. The Q values of coupled WEM resonators exceed 80,000, enabling a narrow bandwidth filter. A 3λ/4-length coupling beam filter (CBF) was demonstrated. The 3λ/4 coupling beam filter has a center frequency of 79.79 MHz and a bandwidth of 0.024 %. The CBF exhibits an impressive 26.39 dB stopband rejection and 6.97 dB insertion loss with 5.13 dB passband ripple. The MEMS filters presented in this work hold significant potential for applications in wireless communication systems.
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