A NOVEL MINIATURE OPTICAL SWITCH WITH DOUBLE VERTICAL MICROMIRRORS DRIVEN BY PIEZOELECTRIC CANTILEVER

Abstract

ABSTRACT This paper presents a novel miniature 2 × 2 optical switch with double vertical micromirrors driven by single piezoelectric cantilever using PZT (Lead Zirconium Titanate) films. Double vertical micromirrors, piezoelectric cantilever and optical fiber V-grooves are integrated on a single silicon chip in compact and low-cost form. The optical switch switches light beams by moving perpendicularly double vertical micromirrors with smooth side surfaces simultaneously which are driven by single piezoelectric cantilever using PZT films. The fabrication process of the optical switch is described. Simulation and analysis have been carried out to evaluate mechanical performance of the optical switch. Due to low insertion loss, small switch size and low power dissipation, this novel optical switch should be promising for optical network applications.