A Novel Micromachined Frequency Tripler Hybrid Component for Integrated Millimeter Wave Subsystems

Abstract

A fully integrated broadband distributed frequency tripler, periodically loaded with HBV devices, has been designed and fabricated and has demonstrated the generation of a broad range of output frequencies of up to 570 GHz. Key to the design is the principle that the entire frequency tripler circuit is produced monolithically and incorporates novel HBV devices electrically and mechanically interconnected by a thin low-loss SU-8 membrane. With the device fabrication approach used, the novel HBV devices are able to produce a higher capacitance-voltage swing ratio whilst simultaneously minimizing the device series and contact resistances to achieve the optimum conversion efficiency. The entire concept of this work was to design a cost effective fully integrated waveguide package, with the frequency tripler circuit mounted at the E-plane of a micromachined waveguide which was constructed with stepped height and width to prevent the propagation of higher order modes inside the waveguide sections. The micromachined waveguide sections exhibit high dimensional accuracy and a good surface finish which is necessary for the efficient propagation of high frequency signals. The frequency tripler circuit and the accompanying micromachined waveguide sections are mounted in a specifically designed metal test fixture to form a compact and cost-effective subcomponent with great commercial potential for broadband harmonic generation of up to terahertz frequencies. This paper presents the design methodology and techniques used to produce the frequency tripler package, together with some initial measurement results.