Abstract
Flow rate determination in microfluidic devices is important in numerous fields. In this paper, a novel technology which allows the formation of polymer microchannels on top of a specific PCB-based thermal flow senor is presented. The microchannel walls are defined by SU-8 on top of an array of Pt sensing elements. The sealing of the microchannel is performed by the thermal bonding of a PMMA plate (Plexiglas ®) on the upper surface of SU-8 layer which is covered with a thin PMMA layer. The width and depth of the microchannel can be fully controlled over an extended range. Excellent thermal isolation of the sensing elements is achieved due to the low thermal conductivity of the materials that comprise the structure. The conducted water flow rate measurements revealed high sensitivity and extended measurement range of the fabricated sensor.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
