A novel micro-electromechanical resonant gyroscope

Abstract

This paper introduces a new high sensitivity micromachined gyroscope. It is an integrated micromechanical vibratory rate gyroscope based on resonant sensing of the Coriolis force. And it has many advantages over rate gyroscopes that utilize displacement sensing for rotation rate measurement. These advantages include a quasi-digital FM (frequency modulation) output, high resolution, large dynamic range, good linearity, low noise and low power consumption. As a whole, the structure includes proof masses, cantilevers, leverage mechanisms, DETF (double-ended tuning fork), driving and checking combs. The structure parameters' influences on capability parameters are analyzed by MATLAB, the mechanical and model analysis of structure are carried out by ANSYS. At first, we have done the modal analysis in order to make sure the first modality of the structure is the working modality. At the same time, we change some parameters to let the frequencies of other interference modalities much higher than that of the working modality. Then, the harmonic analysis is made to get the information of the sensitivity of the structure. Verified from the simulation results, the sensor can successfully realize the purpose of high precision.