A Novel Micro-Pressure Graphene Sensor Array With Double-Layer Mesh Structure

Abstract

In this work, a novel micro-pressure graphene sensor array with double-layer mesh structure is designed in order to effectively realize the multi-point measurement of micro-pressure. A <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$4\times 4$ </tex-math></inline-formula> sensor array could form 16 pressure-sensing pixels with good multi-point measurement capability. The double-layer mesh graphene with interconnected porous microstructure is fabricated with a cheap and convenient laser direct writing (LDW) technique. Based on the excellent microstructure and the double-layer mesh structure, this graphene pressure sensor array demonstrates high sensitivity in the low-pressure range (0.339 kPa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−1</sup> , < 200 Pa), ultra-fast response time (< 30 ms), and prominent repeatability (>200 cycles), which meets the requirements of micro-pressure measurement. In addition, a full-automatic micro-pressure demodulation system equipped with human-computer interaction interface is designed to realize the two-dimensional shape recognition. Therefore, it could open broad applications in the fields of micro-pressure measurement, two-dimensional shape recognition and wearable electronic devices.