Abstract
This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the shape of the supporting springs. In addition, the operational principle of these electrode capacitors and the electrostatic force of the drive electrodes are discussed in detail. The gyroscope with high aspect-ratio structures is manufactured through an efficient fabrication process. Finally, the performance characteristics of the fabricated VRG are tested, and the experimentally obtained the zero-bias instability is about 0.0167°/s and angle random walk (ARW) is about 0.1363°/s1/2 at room temperature. Experimental results show that the VRG has a simple structure and relatively better performance characteristics for low and medium angular velocity measurements.
Highlights
Gyroscopes are inertial sensors that measure the angular rotation about a certain axis
Microelectromechanical systems (MEMS) technology has enabled the miniaturization and massproduction of gyroscopes which exhibit the characteristics of small volume, low power consumption, high reliability and easy integration.[1,2,3,4,5]
Ayazi researched a kind of polysilicon ring gyroscope with a high aspect ratio structure, whose quality factor is 1200, drive mode amplitude is 0.15μm and resolution is 1deg/s
Summary
Gyroscopes are inertial sensors that measure the angular rotation about a certain axis. Microelectromechanical systems (MEMS) technology has enabled the miniaturization and massproduction of gyroscopes which exhibit the characteristics of small volume, low power consumption, high reliability and easy integration.[1,2,3,4,5] Having been widely used in the fields of consumer electronics, vehicle navigation, aircraft control, missile precision guidance, etc.,[1,6,7,8,9] it is gaining increasing attention from researchers. Ayazi researched a kind of polysilicon ring gyroscope with a high aspect ratio structure, whose quality factor is 1200, drive mode amplitude is 0.15μm and resolution is 1deg/s.16. We developed a novel MEMS S-springs vibrating ring gyroscope (MSVRG) and presented the design, manufacturing and experiment
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
