Abstract
This paper presents the mechatronic system design and control of a tip/tilt motion platform with a magnetically levitated mover tailored for dynamic rotational scanning operation. It employs a Lorentz force-based actuation system with five degrees of freedom and four spherical Halbach arrays on a fully passive mover. The system includes highly integrated optical proximity sensors for sensing the mover position in all degrees of freedom and a passive magnetic bearing for restraining the non-actuated degree of freedom. The actuation system enables a mechanical angular range of ±1° in both axes, with first structural modes of the 3D printed mover occurring at 1 kHz. A control system is designed for the five actively controlled degrees of freedom for obtaining a robustly stable and precise motion system. The resulting closed-loop system has a bandwidth of 200 Hz in the rotational and 100 Hz in the translational degrees of freedom and a small positioning uncertainty of 0.02% of the full motion range.
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