Abstract
In this article, a novel architecture of the tunable capacitor is proposed for low-voltage applications. In order to reduce operation voltage by enhancing fringing electric fields, two finger-patterned electrodes with zero spacing are vertically separated by employing a multilayer thin-film dielectric of a para-/ferro-/para-electrics. The proposed tunable capacitor was fabricated on a quartz wafer and its characteristics are analyzed in terms of effective capacitance and tunability with a function of applied voltages, in comparison with the tunable capacitor with the finger-pattern electrode only on the top of the dielectric. At 8 V and 2 GHz, the proposed tunable capacitor shows a tunability of 18% that is 10.3% higher than that of the compared one. © 2013 Wiley Periodicals, Inc. Microwave Opt Technol Lett 55:1152–1155, 2013; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.27500
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