A novel intensity based optical proximity correction algorithm with speedup in lithography simulation

Abstract

It is important to reduce the optical proximity correction (OPC) runtime while maintaining a good result quality. In this paper, we obtain a better formula, which theoretically speeds up the widely used method, optimal coherent approximations (OCA's), by a factor of 2times. We speed up the OPC algorithm further by making it intensity based (IB-OPC), because it requires much less intensity simulations than the conventional edge placement error (EPE) based OPC algorithms. In addition, the IB-OPC algorithm, which uses the efficiently computed sensitivity information, converges faster than the EPE based OPC. Our IB-OPC experimental results show a runtime speedup of up to 15times with a comparable result quality as of the EPE based OPC.