Abstract
A prototype tunable laser of /spl sim/2 mm/spl times/1.5 mm size has been developed for wavelength-division-multiplexing (WDM) application. This device is an integrated micromachined polysilicon three-dimensional (3-D) mirror with a single-mode Fabry-Perot laser diode and an antireflection-coated optical fiber. The micromirror can be driven to move laterally by an electrostatic comb-drive that changes the external cavity length of laser diode enabling wavelength tuning. A wavelength-tunable range of 16 nm is obtained using a driving voltage within /spl plusmn/3 V at a bias voltage of 10 V.
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