A novel hybrid patterning technique for polymer PDMS micro and nanoscale nozzle by double casting

Abstract

Electrohydrodynamic-jet printing (E-jet printing) is an additive manufacturing technology that can deposit various functional materials directly on the target substrate without photolithography mask. This low-cost and practical nanomanufacturing process method can effectively promote the development of nanotechnology. However, how to further reduce the inner diameter of nozzle and improve the resolution of E-jet printing has become an urgent issue to be solved. In this study, we proposed a new hybrid patterning technique, which combined UV lithography and double casting processes to fabricate PDMS nozzles with micro-nano channels. Since the vacuum pressure parameters on the replication precision and UV lithography parameters on micro-nano patterns are crucial during the fabrication of PDMS nozzles, these parameters were carefully examined in the present study. We also investigated the effect of O2 plasma treatment parameters on the water contact angle of PDMS to improve the bonding strength of PDMS. A complete PDMS nozzle with 112 nm deep and 202 nm wide nanochannels was successfully fabricated by using the proposed technique, which demonstrate a potential to manufacture nano-devices with low cost and high precision pattern transfer.